Shared Facilities
Our group uses Duke's Shared Materials Instrumentation Facility (SMiF) for most fabrication & characterization work.
Custom PE-ALD-Evap System
Our group has a custom plasma-enhanced atomic layer deposition (PE-ALD) system that is linked to an electron-beam evaporator (Evap) via an ultra-high vacuum (UHV) loadlock. Additionally, a focused (KDC 40 gridded) ion source is included in the Evap for pre-deposition cleaning or co-deposition "doping" with a low energy ion beam of N2, Ar, H2, or O2 maintained in UHV. This Kurt J. Lesker-built system is housed in the SMIF cleanroom facility here at Duke and some representative pictures are included below.
![Lesker System](/sites/franklin.pratt.duke.edu/files/images/LeskerSystem.jpg)
Franklin Group Facilities
Our lab is in the French Family Science Center (FFSC) at Duke University's West Campus.
Lab in 2014:
Lab in 2020 . . . (well used!):
![Lab in 2020](/sites/franklin.pratt.duke.edu/files/images/LabPic_0.jpg)
The following is a summary of the equipment and capabilities in our lab:
1) Cryogenic Probe Station (Lakeshore CRX-6.5K)--Cryogen-free closed cycle refridgerator (CCR) allows for cooling to sub-10K without monitoring or external tanks. Includes triax connections with an Agilent (Keysight Technologies) B-1500 Semiconductor Parameter Analyzer.
![Cryogenic Probe Station (Lakeshore CRX-6.5K)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/LabPic2_0.jpg?itok=CJla1g2H)
2) Aerosol Jet Printer (Optomec 300 Series)--Advancement on inkjet printing; the ink is pneumatically or ultrasonically atomized into an aerosol that is printed through a nozzle with a sheath of inert gas (like a jet) onto any substrate (e.g., plastic, paper, glass, etc.). Exceptional tool for printing nanomaterial inks into thin films for electronic devices.
![Aerosol Jet Printer (Optomec 300 Series)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/LabPic0.jpg?itok=ycWALjXs)
![Aerosol Jet Printer (Optomec 300 Series)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/LabPic1.jpg?itok=hBBS-p5O)
3) Manual Analytical Probe Station 1 (Signatone H150W)--Tabletop probe station setup for electrical characterization of devices/circuits on rigid or flexible substrates up to 4" in diameter, including stereo-zoom microscope with digital camera. Includes interface with high-precision SMUs.
![Manual Analytical Probe Station 1 (Signatone H150W)-](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/ProbeStation1_0.jpg?itok=3TMR1pM-)
4) Manual Analytical Probe Station 2 --Tabletop probe station setup for electrical characterization of devices/circuits on rigid or flexible substrates up to 4" in diameter, including stereo-zoom microscope with digital camera. Includes interface with high-precision SMUs.
![Manual Analytical Probe Station 2](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/ProbeStation2_0.jpg?itok=4__cExsG)
5) Ferroelectric Tester (Radiant Tech Rt66B)--System for characterization of ferroelectric materials, including polarization measurement in single-pass hysteresis loop in 5 ms with no interlacing.
![Ferroelectric Tester (Radiant Tech Rt66B)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/320_1_RT66BII.jpg?itok=RAfqHkbI)
6) Nitrogen Dessicator Dry-Box--Storage of wafers, samples, and supplies in a recirculated pure nitrogen environment with UV-filtering.
![Nitrogen Dessicator Dry-Box](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/N2cab_0.jpg?itok=1eib2nMW)
7) Hood-Mounted Spin Coater (Laurel WS-650-23B)--Spinner that is mounted in one of our solvent hoods in a UV-filtered light environment for processing solution-based thin films.
![Hood-Mounted Spin Coater (Laurel WS-650-23B)-](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/LabPic3.jpg?itok=yJq_xxNm)
8) Compound Microscope (Zeiss Axio Lab)--Light microscope configured with 5x to 100x objective lenses and a digital camera interface to a dedicated computer for image capture and analysis.
![Compound Microscope (Zeiss Axio Lab)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/Zeiss%20Microscope.jpg?itok=VrlxWfzw)
9) Stereomicroscope (Olympus SZ61)--Equipped with LED transmitted and reflected light imaging with 10x eyepieces and 45x zoom.
![Stereomicroscope (Olympus SZ61)-](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/Olympus%20Microscope.jpg?itok=3E7gYrbg)
10) Vacuum Oven (Isotemp 281A)--Vacuum oven for curing/sintering inks printed in the aerosol jet printing system. Oven can provide inert gas (N2) or low vacuum ambient conditions. Temperatures up to 280 ºC.
![Vacuum Oven (Isotemp 281A)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/Oven.jpg?itok=GZj80Jfq)
11) Fume Hoods (Nu Aire)--Three fume hoods are in the lab: 1 acid hood, 1 solvent processing hood, and 1 spinner hood (with solvent processing area).
![Fume Hoods (Nu Aire)](/sites/franklin.pratt.duke.edu/files/styles/scale_400/public/images/LabPic6.jpg?itok=TfbrJfeC)